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Overview

Plasma-Therm is a leading provider of advanced plasma processing equipment with more than 35 years of focus on customer support, innovation, reliability and low cost of ownership.Plasma-Therm LLC is an established leading provider of advanced plasma processing equipment for the semiconductor industry and related specialty markets.

Plasma-Therm was acquired by Unaxis in 2000 which was later rebranded to Oerlikon in 2006. As of January 2009, Plasma-Therm LLC became an independent and privately owned company through a management buyout.